ARF: Excimer Laser Mirrors, 193nm

ARF: Excimer Laser Mirrors, 193nm

ARF: Excimer Laser Mirrors, 193nm

High power UV excimer laser mirrors for 0° or 45° AOI at 193 nm. These high quality ArF excimer laser mirrors provide high reflectivity, high surface accuracy and quality, and high laser damage threshold. The coating material contains Thorium Fluoride for the 193 nm mirror. Custom mirrors are available upon request.
  • Product Code: ARF, KRF
  • Substrate Material: Standard Grade Corning 7980 1-D (Fused Silica)
  • Thickness Tolerance: +0/-0.25mm
  • Thickness Tolerance: ±0.25mm
  • Wedge: ≤ 5 arc minutes
  • Chamfer: Ø ≤ 50.8mm: 0.35mm leg width at 45° nominal
    Ø > 50.8mm: 0.85mm leg width at 45° nominal
  • S1 Surface Figure: < λ/10 p-v at 633nm before coating;
    after coating on select substrates
  • S1 Surface Quality: 10-5 scratch-dig
    per MIL-PRF 13830b (at 100W)
  • S2 Surface Quality: Commercial polish
  • Clear Aperture: ≥ 85% of central diameter
  • Adhesion and Durability: Per MIL-C-48497a
  • Angle of Incidence: 45° only
  • Reflectance (at 193nm): R ≥ 96.0% at 45°, UNP
  • Reflectance (at 248nm): R > 99.0% at 45°, UNP
  • Damage Threshold: 1 J/cm2, 20ns pulse at 193nm
    3 J/cm2, 8ns pulse at 248nm

4 Items

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  1. ARF-3050-45 $599.00 ea
    VOL USD

    Volume Pricing

    QuantityPrice
    1-9$599.00
    10+$569.05
    4-Weeks: 13 QTY 10-Weeks: 50 QTY
    Wavelength (nm) Dimensions (mm) Thickness (mm) Shape
    193 76.2 12.7 Plano
    Specifications and Downloads

    Specifications

    • Item Description: Excimer Laser Mirrors, 193nm
    • Type: Laser Line Dielectric
    • Thickness (mm): 12.7
    • Surface Quality: 10-5 scratch-dig per MIL-PRF-13830b
    • Surface Figure: λ/10 p-v at 633nm on select substrates
    • Shape: Plano
    • Material: Fused Silica
    • Incident Angle (°): 45
    • Wavelength (nm): 193
    • Dimensions (mm): 76.2

    Downloads

    There are no downloads available at this time.

  2. ARF-2037-45 $415.00 ea
    VOL USD

    Volume Pricing

    QuantityPrice
    1-9$415.00
    10+$394.25
    In-Stock: 1 QTY 4-Weeks: 105 QTY 10-Weeks: 50 QTY
    Wavelength (nm) Dimensions (mm) Thickness (mm) Shape
    193 50.8 9.53 Plano
    Specifications and Downloads

    Specifications

    • Item Description: Excimer Laser Mirrors, 193nm
    • Type: Laser Line Dielectric
    • Thickness (mm): 9.53
    • Surface Quality: 10-5 scratch-dig per MIL-PRF-13830b
    • Surface Figure: λ/10 p-v at 633nm on select substrates
    • Shape: Plano
    • Material: Fused Silica
    • Incident Angle (°): 45
    • Wavelength (nm): 193
    • Dimensions (mm): 50.8

    Downloads

    There are no downloads available at this time.

  3. ARF-1537-45 $355.00 ea
    VOL USD

    Volume Pricing

    QuantityPrice
    1-9$355.00
    10+$337.25
    4-Weeks: 50 QTY 10-Weeks: 50 QTY
    Wavelength (nm) Dimensions (mm) Thickness (mm) Shape
    193 38.1 9.53 Plano
    Specifications and Downloads

    Specifications

    • Item Description: Excimer Laser Mirrors, 193nm
    • Type: Laser Line Dielectric
    • Thickness (mm): 9.53
    • Surface Quality: 10-5 scratch-dig per MIL-PRF-13830b
    • Surface Figure: λ/10 p-v at 633nm on select substrates
    • Shape: Plano
    • Material: Fused Silica
    • Incident Angle (°): 45
    • Wavelength (nm): 193
    • Dimensions (mm): 38.1

    Downloads

    There are no downloads available at this time.

  4. ARF-1025-45 $295.00 ea
    VOL USD

    Volume Pricing

    QuantityPrice
    1-9$295.00
    10+$280.25
    In-Stock: 27 QTY 4-Weeks: 182 QTY 10-Weeks: 50 QTY
    Wavelength (nm) Dimensions (mm) Thickness (mm) Shape
    193 25.4 6.35 Plano
    Specifications and Downloads

    Specifications

    • Item Description: Excimer Laser Mirrors, 193nm
    • Type: Laser Line Dielectric
    • Thickness (mm): 6.35
    • Surface Quality: 10-5 scratch-dig per MIL-PRF-13830b
    • Surface Figure: λ/10 p-v at 633nm on select substrates
    • Shape: Plano
    • Material: Fused Silica
    • Incident Angle (°): 45
    • Wavelength (nm): 193
    • Dimensions (mm): 25.4

    Downloads

    There are no downloads available at this time.

4 Items

per page
Set Descending Direction