KRF: Excimer Laser Mirror 248nm

KRF: Excimer Laser Mirror 248nm

KRF: Excimer Laser Mirror 248nm

High power UV excimer laser mirrors for 45° AOI ; ArF (193 nm), KrF (248 nm), or XeCl (308 nm). These high quality excimer laser mirrors provide high reflectivity, high surface accuracy and quality, and high laser damage threshold for the UV operating wavelengths of ArF, KrF, and XeCl lasers. Mirrors for 0° and 45° AOI use are available from stock, and semi-custom user-specified mirrors for 45° AOI at 193 or 248 nm. Custom mirrors are available upon request.
  • Product Code: ARF, KRF
  • Substrate Material: Standard Grade Corning 7980 1-D (Fused Silica)
  • Thickness Tolerance: +0/-0.25mm
  • Thickness Tolerance: ±0.25mm
  • Wedge: ≤ 5 arc minutes
  • Chamfer: Ø ≤ 50.8mm: 0.35mm leg width at 45° nominal
    Ø > 50.8mm: 0.85mm leg width at 45° nominal
  • S1 Surface Figure: < λ/10 p-v at 633nm before coating;
    after coating on select substrates
  • S1 Surface Quality: 10-5 scratch-dig
    per MIL-PRF 13830b (at 100W)
  • S2 Surface Quality: Commercial polish
  • Clear Aperture: ≥ 85% of central diameter
  • Adhesion and Durability: Per MIL-C-48497a
  • Angle of Incidence: 45° only
  • Reflectance (at 193nm): R ≥ 96.0% at 45°, UNP
  • Reflectance (at 248nm): R > 99.0% at 45°, UNP
  • Damage Threshold: 1 J/cm2, 20ns pulse at 193nm
    3 J/cm2, 8ns pulse at 248nm

4 Items

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  1. KRF-3050-45 $715.00 ea
    VOL

    Volume Pricing

    QuantityPrice
    1-9$715.00
    10+$679.25
    3-Weeks: 42 QTY 9-Weeks: 50 QTY
    Wavelength (nm) Dimensions (mm) Thickness (mm) Shape
    248 76.2 12.7 Plano
    Specifications and Downloads

    Specifications

    • Type: Laser Line Dielectric
    • Thickness (mm): 12.7
    • Surface Quality: 10-5 scratch-dig per MIL-PRF-13830b
    • Surface Figure: λ/10 p-v at 633nm on select substrates
    • Shape: Plano
    • Material: Fused Silica
    • Incident Angle (°): 45
    • Wavelength (nm): 248
    • Dimensions (mm): 76.2

    Downloads

    There are no downloads available at this time.

  2. KRF-2037-45 $315.00 ea
    VOL

    Volume Pricing

    QuantityPrice
    1-9$315.00
    10+$283.50
    In-Stock: 27 QTY 3-Weeks: 177 QTY 9-Weeks: 50 QTY
    Wavelength (nm) Dimensions (mm) Thickness (mm) Shape
    248 50.8 9.53 Plano
    Specifications and Downloads

    Specifications

    • Type: Laser Line Dielectric
    • Thickness (mm): 9.53
    • Surface Quality: 10-5 scratch-dig per MIL-PRF-13830b
    • Surface Figure: λ/10 p-v at 633nm on select substrates
    • Shape: Plano
    • Material: Fused Silica
    • Incident Angle (°): 45
    • Wavelength (nm): 248
    • Dimensions (mm): 50.8

    Downloads

    There are no downloads available at this time.

  3. KRF-1537-45 $295.00 ea
    VOL

    Volume Pricing

    QuantityPrice
    1-9$295.00
    10+$265.50
    9-Weeks: 50 QTY
    Wavelength (nm) Dimensions (mm) Thickness (mm) Shape
    248 38.1 9.53 Plano
    Specifications and Downloads

    Specifications

    • Type: Laser Line Dielectric
    • Thickness (mm): 9.53
    • Surface Quality: 10-5 scratch-dig per MIL-PRF-13830b
    • Surface Figure: λ/10 p-v at 633nm on select substrates
    • Shape: Plano
    • Material: Fused Silica
    • Incident Angle (°): 45
    • Wavelength (nm): 248
    • Dimensions (mm): 38.1

    Downloads

    There are no downloads available at this time.

  4. KRF-1025-45 $229.00 ea
    VOL

    Volume Pricing

    QuantityPrice
    1-9$229.00
    10+$206.10
    3-Weeks: 896 QTY 9-Weeks: 50 QTY
    Wavelength (nm) Dimensions (mm) Thickness (mm) Shape
    248 25.4 6.35 Plano
    Specifications and Downloads

    Specifications

    • Type: Laser Line Dielectric
    • Thickness (mm): 6.35
    • Surface Quality: 10-5 scratch-dig per MIL-PRF-13830b
    • Surface Figure: λ/10 p-v at 633nm on select substrates
    • Shape: Plano
    • Material: Fused Silica
    • Incident Angle (°): 45
    • Wavelength (nm): 248
    • Dimensions (mm): 25.4

    Downloads

    There are no downloads available at this time.

4 Items

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